Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications-Reference-Cited by-同舟云学术

Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications

Published:2005-12-12 Issue:24 Volume:87 Page:241503
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Fujioka Shinsuke,Nishimura Hiroaki,Nishihara Katsunobu,Murakami Masakatsu,Kang Youngces-G,Gu Qincui,Nagai Keiji,Norimatsu Takayoshi,Miyanaga Noriaki,Izawa Yasukazu,Mima Kunioki,Shimada Yoshinori,Sunahara Atsushi,Furukawa Hiroyuki

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2142102

Reference15 articles.

1. Introduction to special issue of Applied Optics on soft-x-ray projection lithography

2. New laser plasma source for extreme-ultraviolet lithography

3. Conversion efficiencies from laser‐produced plasmas in the extreme ultraviolet regime

4. Soft x-ray emissions from laser plasma of cryogenic mixture targets

5. Detailed space-resolved characterization of a laser-plasma soft-x-ray source at 135-nm wavelength with tin and its oxides

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