Introduction to special issue of Applied Optics on soft-x-ray projection lithography
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The Optical Society
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Two dimensional expansion effects on angular distribution of 13.5nm in-band extreme ultraviolet emission from laser-produced Sn plasma;Applied Physics Letters;2008-06-02
2. 3D PIC simulation of ion debris mitigation by B-field for LPP-EUV source;Journal of Physics: Conference Series;2008-05-01
3. Experimental study on extreme ultraviolet light generation from high power laser-irradiated tin slab;Acta Physica Sinica;2008
4. Conversion efficiency of extreme ultraviolet radiation in laser-produced plasmas;Physics of Plasmas;2006-03
5. Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications;Applied Physics Letters;2005-12-12
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