Conversion efficiency of extreme ultraviolet radiation in laser-produced plasmas
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2187445
Reference32 articles.
1. 4d–4f emission resonances in laser-produced plasmas
2. Introduction to special issue of Applied Optics on soft-x-ray projection lithography
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4. New laser plasma source for extreme-ultraviolet lithography
5. Conversion efficiencies from laser‐produced plasmas in the extreme ultraviolet regime
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1. Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma;Applied Physics Letters;2019-09-16
2. Physics of laser-driven tin plasma sources of EUV radiation for nanolithography;Plasma Sources Science and Technology;2019-08-01
3. Efficient Generation of Extreme Ultraviolet Light From Nd :YAG-Driven Microdroplet-Tin Plasma;Physical Review Applied;2019-07-08
4. Modeling of liquid tin target deformation by laser pulse;Keldysh Institute Preprints;2017
5. Vacuum ultraviolet spectral emission properties of Ga, In and Sn droplet-based laser produced plasmas;Spectrochimica Acta Part B: Atomic Spectroscopy;2016-08
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