Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma-Reference-Cited by-同舟云学术

Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma

Published:2019-09-16 Issue:12 Volume:115 Page:124101
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Schupp R.¹^ORCID,Torretti F.¹²^ORCID,Meijer R. A.¹²,Bayraktar M.³^ORCID,Sheil J.¹,Scheers J.¹²^ORCID,Kurilovich D.¹²^ORCID,Bayerle A.¹,Schafgans A. A.⁴,Purvis M.⁴,Eikema K. S. E.¹²,Witte S.¹²,Ubachs W.¹²^ORCID,Hoekstra R.¹⁵,Versolato O. O.¹^ORCID

Affiliation:

1. Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands

2. Department of Physics and Astronomy, and LaserLaB, Vrije Universiteit, De Boelelaan 1081, 1081 HV Amsterdam, The Netherlands

3. Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, Drienerlolaan 5, 7522 NB Enschede, The Netherlands

4. ASML US LP, 17075 Thornmint Ct, San Diego, California 92127, USA

5. Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands

Funder

University of Amsterdam

ASML

H2020 European Research Council

Netherlands Organisation for Scientific Research

Vrije Universiteit Amsterdam