1. Advanced Research Center for Nanolithography 1 , Science Park 106, 1098 XG Amsterdam, The Netherlands
2. Department of Physics and Astronomy and LaserLab, Vrije Universiteit Amsterdam 2 , De Boelelaan 1081, 1081 HV Amsterdam, The Netherlands
3. Department of Applied Physics, Eindhoven University of Technology 3 , Den Dolech 2, 5600 MB Eindhoven, The Netherlands