Performance optimization of MOPA pre-pulse LPP light source

Author:

Schafgans Alexander A.,Brown Daniel J.,Fomenkov Igor V.,Sandstrom Rick,Ershov Alex,Vaschenko Georgiy,Rafac Rob,Purvis Michael,Rokitski Slava,Tao Yezheng,Riggs Daniel J.,Dunstan Wayne J.,Graham Matthew,Farrar Nigel R.,Brandt David C.,Böwering Norbert,Pirati Alberto,Harned Noreen,Wagner Christian,Meiling Hans,Kool Ron

Publisher

SPIE

Reference12 articles.

1. David C. Brandt, Igor V. Fomenkov, Nigel R. Farrar, Bruno La Fontaine, David W. Myers Daniel J. Brown Alex I. Ershov, Norbert R. Böwering, Daniel J. Riggs, Robert J. Rafac, Silvia Dea De, Rudy Peeters, Hans Meiling, Noreen Harned, Daniel Smith, Alberto Pirati, Robert Kazinczi in: Proc. SPIE Vol. 9048, Extreme Ultraviolet (EUV) Lithography V, Obert R. Wood II, Eric M. Panning, Eds., 90480C (2014).

2. LPP source system development for HVM

3. Laser-produced plasma light source for EUVL

4. Performance results of laser-produced plasma test and prototype light sources for EUV lithography

5. LPP source system development for HVM

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