Detailed space-resolved characterization of a laser-plasma soft-x-ray source at 135-nm wavelength with tin and its oxides-Reference-Cited by-同舟云学术

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Detailed space-resolved characterization of a laser-plasma soft-x-ray source at 135-nm wavelength with tin and its oxides

Published:2000-09-01 Issue:9 Volume:17 Page:1616
ISSN:0740-3224
Container-title:Journal of the Optical Society of America B
language:en
Short-container-title:J. Opt. Soc. Am. B

Author:

Choi Il Woo,Daido Hiroyuki,Yamagami Susumu,Nagai Keiji,Norimatsu Takayoshi,Takabe Hideaki,Suzuki Masayuki,Nakayama Takeyoshi,Matsui Tetsuya

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Statistical and Nonlinear Physics

Reference27 articles.

1. Laser-produced plasmas for soft x-ray projection lithography

2. X-ray production ~13 nm from laser-produced plasmas for projection x-ray lithography applications

3. Conversion efficiencies from laser‐produced plasmas in the extreme ultraviolet regime

4. Diffraction-limited soft x-ray projection lithography with a laser plasma source

5. 4d–4f emission resonances in laser-produced plasmas

Cited by 53 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Relativistic calculation of electron impact excitation of tin: cross sections of importance in plasma modeling;Plasma Sources Science and Technology;2023-07-01

2. The development of laser-produced plasma EUV light source;Chip;2022-09

3. Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets;Journal of Physics D: Applied Physics;2021-06-28

4. Electrochemically Synthesized Tin/Lithium Alloy To Convert Laser Light to Extreme Ultraviolet Light;ACS Omega;2018-10-02

5. High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas;Review of Scientific Instruments;2017-03

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