Shape evolution of high aspect ratio holes on Si(001) during hydrogen annealing
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4829912
Reference33 articles.
1. Silicon-on-Nothing (SON)-an innovative process for advanced CMOS
2. Horizontal buried channels in monocrystalline silicon
3. Innovative lift-off solar cell made of monocrystalline-silicon thin film by annealing of ordered macropores
4. Thermal Annealing in Hydrogen for 3-D Profile Transformation on Silicon-on-Insulator and Sidewall Roughness Reduction
5. Anisotropic capillary instability of silicon nanostructures under hydrogen anneal
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