Anisotropic capillary instability of silicon nanostructures under hydrogen anneal
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3690869
Reference14 articles.
1. Micro-structure Transformation of Silicon: A Newly Developed Transformation Technology for Patterning Silicon Surfaces using the Surface Migration of Silicon Atoms by Hydrogen Annealing
2. Thermal Annealing in Hydrogen for 3-D Profile Transformation on Silicon-on-Insulator and Sidewall Roughness Reduction
3. Hydrogen annealing effect on DC and low-frequency noise characteristics in CMOS FinFETs
4. Shape transformation of silicon trenches during hydrogen annealing
5. Hydrogen pressure dependence of trench corner rounding during hydrogen annealing
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