Mechanical Property Measurement of Micro/Nanoscale Materials for MEMS : A Review
Author:
Affiliation:
1. Faculty of Engineering, Kyoto University of Advanced Science 18 Yamanouchi‐Gotanda, Ukyo Kyoto 615‐8577 Japan
Publisher
Wiley
Subject
Electrical and Electronic Engineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/tee.23747
Reference153 articles.
1. Silicon as a mechanical material
2. Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films
3. Micro tensile‐test system fabricated on a single crystal silicon chip;Sato K;Proceedings of the IEEE MEMS,1996
4. Measurement of mechanical properties for MEMS materials
5. Development of AFM Tensile Test Technique for Evaluating Mechanical Properties of Sub-Micron Thick DLC Films
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