Analysis of lattice deformation originated from residual stress on performance of aluminum nitride-based bulk acoustic wave resonators
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Published:2024-07
Issue:
Volume:340
Page:118203
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ISSN:0263-8223
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Container-title:Composite Structures
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language:en
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Short-container-title:Composite Structures
Author:
Gu Xiyu,
Liu Yan,
Qu YuanhangORCID,
Wei Min,
Chen Xiang,
Wang Yaxin,
Liu Wenjuan,
Pi Bensong,
Woon Soon Bo,
Cai Yao,
Guo ShishangORCID,
Sun Chengliang