Sub-micron features from polymer-derived SiOC via imprint lithography
Author:
Funder
National Science Foundation
Publisher
Elsevier BV
Subject
Materials Chemistry,Ceramics and Composites
Reference48 articles.
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4. Fabrication of SiOC ceramic microparts and patterned structures from polysiloxanes via liquid cast and pyrolysis;Liu;J. Am. Ceram. Soc.,2009
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fabrication of micro/submicron hierarchical structures on ceramic sheet surfaces combining 2-step imprinting and in-plane compression processes;Japanese Journal of Applied Physics;2024-03-01
2. A pyrolysis heating rate based pressureless method for preparing dense and crack-free polymer-derived silicon oxycarbide bulk ceramics;Ceramics International;2020-06
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