Kinetics of Si1−xGex(001) growth on Si(001)2×1 by gas-source molecular-beam epitaxy from Si2H6 and Ge2H6
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.368882
Reference44 articles.
1. Prospects of SiGe heterodevices
2. High-performance Si/SiGe n-type modulation-doped transistors
3. Physics and applications of GexSi1-x/Si strained-layer heterostructures
4. Mechanisms and kinetics of Si atomic‐layer epitaxy on Si(001)2×1 from Si2H6
5. Si(001)2×1 gas‐source molecular‐beam epitaxy from Si2H6: Growth kinetics and boron doping
Cited by 35 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A Benchmark of Germane and Digermane for the Low Temperature Growth of Intrinsic and Heavily in-situ Boron-Doped SiGe;ECS Transactions;2016-08-18
2. Ultra-low temperature (≤300 °C) growth of Ge-rich SiGe by solid-liquid-coexisting annealing of a-GeSn/c-Si structures;Journal of Applied Physics;2015-09-07
3. Heteroepitaxial Growth of Si, Si1−xGex-, and Ge-Based Alloy;Handbook of Crystal Growth;2015
4. Digermane Deposition on Si(100) and Ge(100): from Adsorption Mechanism to Epitaxial Growth;The Journal of Physical Chemistry C;2013-12-24
5. Low temperature RPCVD epitaxial growth of Si1−xGex using Si2H6 and Ge2H6;Solid-State Electronics;2013-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3