Er2O3 as a high-K dielectric candidate
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2775084
Reference14 articles.
1. Optical and structural properties of Er2O3 films grown by magnetron sputtering
2. Superior electrical properties of crystalline Er2O3 films epitaxially grown on Si substrates
3. Interfacial reactions between thin rare-earth-metal oxide films and Si substrates
4. Structural and electrical properties of electron beam gun evaporated Er2O3 insulator thin films
5. Structural properties and electrical characteristics of electron-beam gun evaporated erbium oxide films
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