Interfacial reactions between thin rare-earth-metal oxide films and Si substrates
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1357445
Reference16 articles.
1. Thermodynamic stability of binary oxides in contact with silicon
2. Intermixing at the tantalum oxide/silicon interface in gate dielectric structures
3. Formation of silicon–oxide layers at the interface between tantalum oxide and silicon substrate
4. Electrical characteristics of metal‐insulator‐semiconductor diodes with ZrO2/SiO2dielectric films
5. Structure and stability of ultrathin zirconium oxide layers on Si(001)
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