Structural properties and electrical characteristics of electron-beam gun evaporated erbium oxide films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1456267
Reference12 articles.
1. Structural and electrical characteristics of metal‐insulator‐semiconductor diodes based on Y2O3dielectric thin films on silicon
2. Properties of high κ gate dielectrics Gd2O3 and Y2O3 for Si
3. Characteristics of Ga[sub 2]O[sub 3](Gd[sub 2]O[sub 3])/GaAs interface: Structures and compositions
4. Erbium-oxide-based metal-insulator-semiconductor structures on silicon
5. Interfacial reactions between thin rare-earth-metal oxide films and Si substrates
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