Multispecies nitrogen diffusion in silicon-Reference-Cited by-同舟云学术

Multispecies nitrogen diffusion in silicon

Published:2006-10-15 Issue:8 Volume:100 Page:083511
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Voronkov V. V.,Falster R.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2359609

Reference25 articles.

1. Dynamic Behavior of Intrinsic Point Defects in Fz and Cz Silicon Crystals

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4. Oxygen precipitation in nitrogen-doped Czochralski-grown silicon crystals

5. K. Nakamura, T. Saishoji, S. Togawa, and J. Tomioka, Proceedings of the Kazusa Academia Park Forum on the Science and Technology of Silicon Materials (The Japan Technical Information Service, Kazusa Academia Park, Chiba, 2001), p. 109.

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