Suppression of the standing wave effect in high frequency capacitive discharges using a shaped electrode and a dielectric lens: Self-consistent approach
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1770900
Reference11 articles.
1. Glow discharge processing in the liquid crystal display industry
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5. Analytical model of a dual frequency capacitive sheath
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