Texture formation in titanium nitride films prepared by chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.362358
Reference39 articles.
1. TiCxNy and TiCx-TiN films obtained by CVD in an ultrasonic field
2. Transmission electron microscopy studies of growth and interface structure of chemically vapour deposited TiC and TiN films on WCCo alloy subsrates
3. Effects of the experimental conditions of chemical vapour deposition on a TiC/TiN double-layer coating
4. Growth mechanism of star-shaped TiN crystals
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