TiCxNy and TiCx-TiN films obtained by CVD in an ultrasonic field-Reference-Cited by-同舟云学术

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TiCxNy and TiCx-TiN films obtained by CVD in an ultrasonic field

Published:1979-06 Issue:6 Volume:14 Page:1285-1290
ISSN:0022-2461
Container-title:Journal of Materials Science
language:en
Short-container-title:J Mater Sci

Author:

Takahashi T.,Itoh H.

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/BF00549299.pdf

Reference12 articles.

1. T. Takahashi and H. Itoh, J. Electrochem. Soc. 124 (1977) 797.

2. L. Aggour, E. Fiter and W. Weisweiler, High Temp. High Pres. 6 (1974) 73.

3. G. Wakefield and J. Bloom, Proceedings of the 3rd International Conference on C.V.D. (1972) p. 397.

4. H. Pierson, Thin Solid Films 40 (1977) 41.

5. G. Wakefield, C. Yaws and J. Bloom, Proceedings of the 4th International Conference on C.V.D. (1973) pp. 173, 577.

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