Effect of CO addition on the microstructure and properties of TiN coatings grown by chemical vapor deposition-Reference-Cited by-同舟云学术

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Effect of CO addition on the microstructure and properties of TiN coatings grown by chemical vapor deposition

Published:2024-09 Issue: Volume:804 Page:140469
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Liu Bolu,Zhong Shuqi,Zhuang Limin,Lin Liangliang,Zheng Aiqin,Liu Chao^ORCID

Publisher

Elsevier BV

Reference21 articles.

1. Cutting tool materials coated by chemical vapour deposition;Schintlmeister;Wear,1984

2. Influence of B content on microstructure, phase composition and mechanical properties of CVD Ti(B,N) coatings;Tkadletz;Materialia,2022

3. Ternary and quarternary TiSiN and TiSiCN nanocomposite coatings obtained by Chemical Vapor Deposition;Endler;Surf. Coatings Technol.,2013

4. Microstructure and properties of Ti(C,N) coatings produced by moderate temperature chemical vapour deposition;Larsson;Thin Solid Films,2002

5. Nanostructured coatings for tooling applications;Köpf;Int. J. Refract. Met. Hard Mater.,2017

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