Enhancement of SiO2/Si(001) interfacial oxidation induced by thermal strain during rapid thermal oxidation
Author:
Affiliation:
1. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai 980-8577, Japan
2. Japan Atomic Energy Agency, Sayo, Hyogo 679-5148, Japan
3. National Institute of Technology, Akita College, Akita 011-8511, Japan
Funder
Kurata Memorial Hitachi Science and Technology Foundation
Japan Society for the Promotion of Science (JSPS)
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4962671
Reference44 articles.
1. General Relationship for the Thermal Oxidation of Silicon
2. Thermal Oxidation of Silicon in Dry Oxygen: Growth‐Rate Enhancement in the Thin Regime: II . Physical Mechanisms
3. First-Principles Study of Oxide Growth on Si(100) Surfaces and atSiO2/Si(100) Interfaces
4. Universal Theory of Si Oxidation Rate and Importance of Interfacial Si Emission
5. New Mechanism for Oxidation of Native Silicon Oxide
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Oxidation tuning of ferroic transitions in Gd2C monolayer;The Journal of Chemical Physics;2024-01-04
2. The ST component in the Si 2p photoemission spectrum from H-terminated and oxidized Si (001) surfaces;Journal of Vacuum Science & Technology A;2023-05-30
3. Evaluation of doped potassium concentrations in stacked Two-Layer graphene using Real-time XPS;Applied Surface Science;2022-12
4. Quantitative Evaluation of Doped Potassium Concentrations in Stacked Tow-Layer Graphene Using X-Ray Photoelectron Spectroscopy;SSRN Electronic Journal;2022
5. Roles of strain and carrier in silicon oxidation;Japanese Journal of Applied Physics;2020-04-24
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3