Pressure dependence of dissociation fraction and optical emission characteristics in low-pressure inductively coupled N2-Ar plasmas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3628670
Reference39 articles.
1. Determination of the degree of dissociation in an inductively coupled hydrogen plasma using optical emission spectroscopy and laser diagnostics
2. Electron-temperature dependence of nitrogen dissociation in 915 MHz ECR plasma
3. Characterization of neutral species densities in dual frequency capacitively coupled photoresist ash plasmas by optical emission actinometry
4. Enhancement of the molecular nitrogen dissociation levels by argon dilution in surface-wave-sustained plasmas
5. Atomic nitrogen production in a high efficiency microwave plasma source
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