Atomic nitrogen production in a high efficiency microwave plasma source-Reference-Cited by-同舟云学术

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Atomic nitrogen production in a high efficiency microwave plasma source

Published:1996-01 Issue:1 Volume:14 Page:152-155
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

McCullough R. W.,Geddes J.,Croucher J. A.,Woolsey J. M.,Higgins D. P.,Schlapp M.,Gilbody H. B.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.579912

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