Simulation-aided design of very-high-frequency excited nitrogen plasma confinement using a shield plate-Reference-Cited by-同舟云学术

Simulation-aided design of very-high-frequency excited nitrogen plasma confinement using a shield plate

Published:2019-11 Issue:6 Volume:37 Page:061215
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Isobe Yasuhiro¹²,Sakai Takayuki¹³,Suguro Kyoichi¹³,Miyashita Naoto¹³,Kondo Hiroki²³,Ishikawa Kenji³^ORCID,Wilson Amalraj Frank³,Shimizu Naohiro³,Oda Osamu³,Sekine Makoto³,Hori Masaru²³

Affiliation:

1. Toshiba Electronic Devices and Storage Corporation, Nomi, Ishikawa 923-1293, Japan

2. Graduate School of Engineering, Nagoya University, Nagoya, Aichi 464-8603, Japan

3. Center for Low-Temperature Plasma Sciences, Nagoya University, Nagoya, Aichi 464-8601, Japan

Funder

New Energy and Industrial Technology Development Organization

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5114831

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