Measurement of Si atom density in radio‐frequency silane plasma using ultraviolet absorption spectroscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.348514
Reference11 articles.
1. Spatial Distribution of SiH3Radicals in RF Silane Plasma
2. Spatial concentrations of silicon atoms by laser‐induced fluorescence in a silane glow discharge
3. Laser‐induced fluorescence spectroscopy for the determination of the absolute density and spatial distribution of Si atoms in a SiH4‐He‐Ar glow discharge
4. Diffusion of Si atoms and thin film deposition in a silane-argon plasma
5. Effects of low‐frequency modulation on rf discharge chemical vapor deposition
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