Laser‐induced fluorescence spectroscopy for the determination of the absolute density and spatial distribution of Si atoms in a SiH4‐He‐Ar glow discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.342476
Reference16 articles.
1. Spatial concentrations of silicon atoms by laser‐induced fluorescence in a silane glow discharge
2. Particle Distributions and Laser-Particle Interactions in an RF Discharge of Silane
3. Production mechanism and reactivity of the SiH radical in a silane plasma
4. Laser diagnostics of a silane plasma—SiH radicals in an a‐Si:H chemical vapor deposition system
5. Comparisons between a gas‐phase model of silane chemical vapor deposition and laser‐diagnostic measurements
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