Reaction of atomic fluorine with silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.336133
Reference17 articles.
1. Plasma etching—A discussion of mechanisms
2. The reaction of fluorine atoms with silicon
3. Reaction of atomic fluorine with silicon: The gas phase products
4. The etching of silicon with XeF2vapor
5. The reaction probability of XeF2with silicon
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