Reaction of atomic fluorine with silicon: The gas phase products
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.331122
Reference16 articles.
1. Studies of chemiluminescence accompanying fluorine atom etching of silicon
2. The reaction of fluorine atoms with silicon
3. The chemistry of silicon difluoride: A reactive carbene analog
4. Chemistry of Silicon Difluoride
5. The etching of silicon with XeF2vapor
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