Author:
Ryssel H.,Kranz H.,Müller K.,Henkelmann R. A.,Biersack J.
Subject
Physics and Astronomy (miscellaneous)
Cited by
27 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Energy broadening of neutron depth profiles by thin polyamide films;Journal of Radioanalytical and Nuclear Chemistry;2022-09-07
2. Ion Implantation;Fundamentals of Semiconductor Processing Technology;1995
3. SIMS and depth profiling of semiconductor structures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03
4. High energy implantation of 10B and 11B into (100) silicon in channel and in random direction;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-06
5. Range measurement of boron isotopes in silicon from 600 keV to 2 MeV;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-06