Subject
Physics and Astronomy (miscellaneous)
Cited by
9 articles.
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1. SIMS and depth profiling of semiconductor structures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03
2. High energy implantation of 10B and 11B into (100) silicon in channel and in random direction;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-06
3. Isotope effects for mega‐electron‐volt boron ions in amorphous silicon;Journal of Applied Physics;1993-05-15
4. Isotope effects for ion-implantation profiles in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
5. Boron implantation in silicon: Isotope effects studied by secondary ion mass spectrometry;Journal of Applied Physics;1990-07