Author:
Goppelt P.,Biersack J.P.,Gebauer B.,Fink D.,Bohne W.,Wilpert M.,Wilpert Th.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
3 articles.
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1. Improved algorithm for calculation of range and range straggling in ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-11
2. Note on isotopic effects in range calculations of high-energy ion beams;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-05
3. MeV Boron Implantation and Masking;MRS Proceedings;1993