Author:
Vaidyanathan K. V.,Chatterjee Pallab K.,Streetman B. G.
Subject
Physics and Astronomy (miscellaneous)
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. SIMS and depth profiling of semiconductor structures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03
2. Isotope effects for mega‐electron‐volt boron ions in amorphous silicon;Journal of Applied Physics;1993-05-15
3. Isotope effects for ion-implantation profiles in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
4. Boron implantation in silicon: Isotope effects studied by secondary ion mass spectrometry;Journal of Applied Physics;1990-07
5. Comparison of range and range straggling of implanted10B and11B in silicon;Applied Physics Letters;1977-04-15