Correlation between nucleation layer structure, dislocation density, and electrical resistivity for GaN films grown on a-plane sapphire by metalorganic vapor phase epitaxy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1428769
Reference15 articles.
1. Influence of sapphire nitridation on properties of gallium nitride grown by metalorganic chemical vapor deposition
2. Nucleation layer evolution in metal‐organic chemical vapor deposition grown GaN
3. The influence of OMVPE growth pressure on the morphology, compensation, and doping of GaN and related alloys
4. Nucleation layer microstructure, grain size, and electrical properties in GaN grown on a-plane sapphire
5. Trapping effects and microwave power performance in AlGaN/GaN HEMTs
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2. Effect of H Plasma Treatment of the Nucleation Layer on AlN Epitaxy in Microwave Plasma Chemical Vapor Deposition;Crystal Growth & Design;2023-03-14
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4. High-quality AlN nucleation layer on SiC substrate grown by MOVPE: Growth, structural and optical characteristics;Materials Science and Engineering: B;2022-04
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