Author:
Tung Chih‐Hang,Lee Kay‐Yuan,Deng Ray‐Chern,Lee Lurng‐Sheng
Subject
Physics and Astronomy (miscellaneous)
Cited by
2 articles.
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1. Polarity-dependent dielectric breakdown-induced epitaxy (DBIE) in Si MOSFETs;IEEE Electron Device Letters;2002-09
2. Film interface control in integrated processing systems;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-07