1. Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
2. Key Laboratory of Key Film Materials and Application for Equipments (Hunan Province), School of Material Sciences and Engineering, Xiangtan University, Xiangtan 411105, Hunan, China
3. Hunan Provincial Key Laboratory of Thin Film Materials and Devices, School of Material Sciences and Engineering, Xiangtan University, Xiangtan 411105, Hunan, China
4. State Key Laboratory of Crystal Materials, Key Laboratory of Functional Crystal Materials and Device, Shandong University, Jinan 250100, China
5. University of Chinese Academy of Sciences, Beijing 100049, China
6. Jiangsu National Synergetic Innovation Center for Advanced Materials (SICAM), Nanjing 210023, China
7. State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen University, Guangzhou 510275, China