High-quality and highly-transparent AlN template on annealed sputter-deposited AlN buffer layer for deep ultra-violet light-emitting diodes-Reference-Cited by-同舟云学术

High-quality and highly-transparent AlN template on annealed sputter-deposited AlN buffer layer for deep ultra-violet light-emitting diodes

Published:2017-05 Issue:5 Volume:7 Page:055110
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Huang Chia-Yen¹,Wu Pei-Yu²,Chang Kai-Shiang¹,Lin Yun-Hsiang³,Peng Wei-Chih³,Chang Yem-Yeu⁴,Li Jui-Ping⁴,Yen Hung-Wei⁵,Wu YewChung Sermon²,Miyake Hideto⁶^ORCID,Kuo Hao-Chung¹

Affiliation:

1. Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, 1001 Ta Hsueh Rd., Hsinchu 300, Taiwan

2. Department of Materials Science and Engineering, National Chiao-Tung University, 1001 Ta Hsueh Rd., Hsinchu 300, Taiwan

3. Research and Development Center, Epistar Corporation, 21, Li-Hsin Rd., Hsinchu Science Park, Hsinchu 300, Taiwan

4. Advanced Technology Development Division, Crystalwise Technology Inc., No.8, Ke Bei 5th Rd., Jhunan Science Park, Miaoli County 35053, Taiwan

5. Department of Materials Science and Engineering, National Chiao-Tung University, No. 1, Sec. 4, Roosevelt Road, 10617 Taipei, Taiwan

6. Department of Electrical and Electronic Engineering, Mie University, 1577 Kurimamachiya, Tsu, Mie 514-8507, Japan

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Reference23 articles.

1. Ultraviolet light-emitting diodes based on group three nitrides

2. Recent progress and future prospects of AlGaN-based high-efficiency deep-ultraviolet light-emitting diodes

3. AlGaN deep ultraviolet LEDs on bulk AlN substrates

4. Modulated precursor flow epitaxial growth of AlN layers on native AlN substrates by metal-organic chemical vapor deposition

5. Preparation of a Freestanding AlN Substrate from a Thick AlN Layer Grown by Hydride Vapor Phase Epitaxy on a Bulk AlN Substrate Prepared by Physical Vapor Transport

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