Electron‐impact ionization cross sections of the SiF3 free radical
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.454836
Reference21 articles.
1. Gaseous products from the reaction of XeF2with silicon
2. Ion‐assisted etching of silicon by SF6
3. Electron-Impact Ionization and Dissociative Ionization of the CD3and CD2Free Radicals
4. Absolute cross sections for electron‐impact ionization and dissociative ionization of the SiF free radical
5. Absolute cross sections for electron-impact ionization of the rare-gas atoms by the fast-neutral-beam method
Cited by 58 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. On the electron impact cross-section maxima for dissociative and non-dissociative single ionization of molecules and radicals;Canadian Journal of Physics;2023-11-02
2. Ion beam experiments for the study of plasma–surface interactions;Journal of Physics D: Applied Physics;2014-05-14
3. Parallel 2D Axisymmetric Fluid Modeling of CF4Discharge in an Inductively Coupled Plasma Source During SiO2Etching;Plasma Processes and Polymers;2014-02-19
4. Theoretical study on electron collisions withSiFandSiF2radicals in the low- and intermediate-energy range;Physical Review A;2007-10-08
5. High-temperature mass spectrometry: Instrumental techniques, ionization cross-sections, pressure measurements, and thermodynamic data (IUPAC Technical Report);Pure and Applied Chemistry;2005-01-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3