Absolute cross sections for electron‐impact ionization and dissociative ionization of the SiF free radical
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.454161
Reference12 articles.
1. Electron-Impact Ionization and Dissociative Ionization of the CD3and CD2Free Radicals
2. Gaseous products from the reaction of XeF2with silicon
3. Gaseous products from the reaction of XeF2with silicon
4. Laser‐induced fluorescence study of silicon etching process: Detection of SiF2and CF2radicals
5. Laser detection of diatomic products of plasma sputtering and etching
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