Laser detection of diatomic products of plasma sputtering and etching
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.95280
Reference14 articles.
1. Optical techniques in plasma diagnostics
2. Detection of CF2radicals in a plasma etching reactor by laser‐induced fluorescence spectroscopy
3. Laser diagnostics of plasma etching: Measurement of Cl+2 in a chlorine discharge
4. Summary Abstract: Laser‐induced fluorescence diagnostics of glow discharges: Spatially resolved concentration profiles
5. Summary Abstract: Laser‐induced fluorescence diagnostics of glow discharges: Spatially resolved concentration profiles
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