Oxygen-induced inhibition of silicon-on-insulator dewetting
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4865243
Reference21 articles.
1. Engineering strained silicon on insulator wafers with the Smart CutTM technology
2. Challenges and Progress in Germanium-on-Insulator Materials and Device Development towards ULSI Integration
3. Thermal instability of silicon-on-insulator thin films measured by low-energy electron microscopy
4. Dewetting dynamics of silicon-on-insulator thin films
5. Dynamics, anisotropy, and stability of silicon-on-insulator dewetting fronts
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