Rim Nucleation and Step-Train Orientation E Ects in Soi(111) Dewetting-Reference-Cited by-同舟云学术

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Rim Nucleation and Step-Train Orientation E Ects in Soi(111) Dewetting

Published:2023 Issue: Volume: Page:
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Author:

Curiotto Stefano,Muller Pierre,Cheynis Fabien,Ozerov Igor,Leroy Frederic

Publisher

Elsevier BV

Reference28 articles.

1. Metal silicides in CMOS technology: past, present, and future trends;S.-L Zhang;Critic Reviews in Solid State and Materials Science,2003

2. Formation of silicon islands on a silicon on insulator substrate upon thermal annealing;B Legrand;Applied Physics Letters,2000

3. How to control solid state dewetting: A short review;F Leroy;Surface Science Reports,2016

4. Eect of patterning on thermal agglomeration of ultrathin silicon-oninsulator layer;Y Ishikawa;Applied Surface Science,2002

5. Pattern-induced alignment of silicon islands on buried oxide layer of silicon-oninsulator structure;Y Ishikawa;Applied Physics Letters,2003

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