Production of higher silanes in radio frequency SiH4 and H2-SiH4 plasmas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1786666
Reference6 articles.
1. Silane dissociation products in deposition discharges
2. Plasma chemistry in silane/germane and disilane/germane mixtures
3. Plasma chemistry in disilane discharges
4. Small particle growth in silane radio-frequency discharges
5. Transition from a capacitive to a resistive regime in a silane radio frequency discharge and its possible relation to powder formation
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5. Time-dependent gas phase kinetics in a hydrogen diluted silane plasma;Applied Physics Letters;2009-02-16
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