Plasma chemistry in silane/germane and disilane/germane mixtures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350663
Reference32 articles.
1. The optoelectronic properties of a-Si, Ge:H(F) alloys
2. Thermal relaxation of the electric conductivity in amorphous silicon-germanium alloys
3. Effect of Ion Bombardment on the Growth and Properties of Hydrogenated Amorphous Silicon-Germanium Alloys
4. Spectroscopic diagnostics of plasma‐chemical‐vapor deposition from silane and germane
5. Diagnostics of silane and germane radio frequency plasmas by coherent anti‐Stokes Raman spectroscopy
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