Time-dependent gas phase kinetics in a hydrogen diluted silane plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3086312
Reference18 articles.
1. Cross-Sections, Rate Constants and Transport Coefficients in Silane Plasma Chemistry
2. A model for the discharge kinetics and plasma chemistry during plasma enhanced chemical vapor deposition of amorphous silicon
3. Control of plasma chemistry for preparing highly stabilized amorphous silicon at high growth rate
4. Electron impact study of ionization and dissociation of monosilane and disilane
5. Radical species in argon‐silane discharges
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