Radical species in argon‐silane discharges
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.94413
Reference7 articles.
1. Glow discharge preparation of amorphous hydrogenated silicon from higher silanes
2. Kinetics and mechanism of amorphous hydrogenated silicon growth by homogeneous chemical vapor deposition
3. Diffusion of Si atoms and thin film deposition in a silane-argon plasma
4. A study of the silane glow discharge deposition by isotopic labelling
5. Bond dissociation energy values in silicon-containing compounds and some of their implications
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