HfO2-based InP n-channel metal-oxide-semiconductor field-effect transistors and metal-oxide-semiconductor capacitors using a germanium interfacial passivation layer
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2961119
Reference15 articles.
1. Enhancement-mode InP n-channel metal-oxide-semiconductor field-effect transistors with atomic-layer-deposited Al2O3 dielectrics
2. Channel mobility enhancement in InP metal‐insulator‐semiconductor field‐effect transistors
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4. Role of Ga2O3 template thickness and gadolinium mole fraction in GdxGa0.4−xO0.6/Ga2O3 gate dielectric stacks on GaAs
5. Low D/sub it/, thermodynamically stable Ga/sub 2/O/sub 3/-GaAs interfaces: fabrication, characterization, and modeling
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1. Effects of fluorine plasma pre-treatment on electrical properties of high-κ-based InP metal-oxide-semiconductor device;Applied Surface Science;2022-05
2. Improving Electrical Properties by Effective Sulfur Passivation via Modifying the Surface State of Substrate in HfO2/InP Systems;The Journal of Physical Chemistry C;2018-03-20
3. Determination of band offset in InP/YSZ hetero-junction by X-ray photoelectron spectroscopy;Vacuum;2018-01
4. Al2O3 Passivation Effect in HfO2·Al2O3 Laminate Structures Grown on InP Substrates;ACS Applied Materials & Interfaces;2017-05-15
5. Gd2O3 on InP Substrates;Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets;2017
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