Tuning of the work function of bilayer metal gate by in-situ atomic layer lamellar doping of AlN in TiN interlayer
Author:
Affiliation:
1. Department of Materials Science and Engineering, National Taiwan University, Taipei 10617, Taiwan
Funder
Ministry of Science and Technology, Taiwan (MOST)
Taiwan Semiconductor Manufacturing Company (TSMC)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5001129
Reference41 articles.
1. Fermi-Level Pinning at the Polysilicon/Metal–Oxide Interface—Part II
2. The effects of boron penetration on p/sup +/ polysilicon gated PMOS devices
3. Metal-dielectric band alignment and its implications for metal gate complementary metal-oxide-semiconductor technology
4. Impact of gate workfunction on device performance at the 50 nm technology node
5. Dual work function metal gate CMOS technology using metal interdiffusion
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of Stacked Work Function Metals on Gate Stress Reliability of n- and p-FinFETs;IEEE Transactions on Electron Devices;2023-08
2. High-Performance Pentacene Organic Thin-Film Transistor Based on Room-Temperature- Processed Hf0.13La0.87O as Gate Dielectric;IEEE Electron Device Letters;2021-03
3. Modifying Threshold Voltages to n- and p- Type FinFETs by Work Function Metal Stacks;IEEE Open Journal of Nanotechnology;2021
4. Leakage current lowering and film densification of ZrO2 high-k gate dielectrics by layer-by-layer, in-situ atomic layer hydrogen bombardment;Materials Science in Semiconductor Processing;2020-04
5. Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review;Micromachines;2018-11-29
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3