Electron energy distribution function control in gas discharge plasmas-Reference-Cited by-同舟云学术

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Electron energy distribution function control in gas discharge plasmas

Published:2013-10 Issue:10 Volume:20 Page:101611
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Godyak V. A.

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4823075

Reference45 articles.

1. Nonequilibrium EEDF in gas discharge plasmas

2. Two-dimensional cylindrical plasma for intermediate gas pressures

3. Does high density–low pressure etching depend on the type of plasma source?

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