Abstract
Abstract
The electron energy distribution function (EEDF) were reconstructed from both collected emission line intensities and a collisional radiative model. The obtained EEDFs from this method were compared with those obtained from Langmuir probe diagnostics over a wide range of discharge conditions (
n
e
∼1010–1012 cm
−
3,
T
eff
∼ 1–3 eV,
p
gas
≲ 67 Pa) for low-pressure Ar/Kr discharges. In particular, we investigated the factors that affect the accuracy and uncertainty of the EEDF via sensitivity analysis. The following conclusions were obtained: (1) using a sufficiently large number (≳20–30) of Ar/Kr2p-1s emission lines can increase the accuracy of the determined EEDF; (2) for discharges with low electron densities, using emission line sets for both Ar and Kr [instead of only one (Ar or Kr) line set] can significantly reduce the uncertainty in the determined EEDF.
Funder
National Natural Science Foundation of China
National Key Research and Development Program of China